Title :
Thin-film piezoelectric-on-silicon particle mass sensors
Author :
Harrington, Brandon P. ; Abdolvand, Reza ; Hajjam, Arash ; Wilson, James C. ; Pourkamali, Siavash
Author_Institution :
Sch. of Electr. & Comput. Eng., Oklahoma State Univ., Tulsa, OK, USA
Abstract :
In this paper, high quality factor (Qair>18000), high frequency (~27 MHz and ~54 MHz), lateral-extensional mode film piezoelectric-on-silicon resonators are used as aerosol particle mass sensors. Using an aerosol particle generator, mass sensitivities of ~4.2 Hz/pg and ~42 Hz/pg are measured respectively which confirms the benefits of employing higher frequency resonators given the quality factor is not deteriorated. These results are in good agreement with the theoretical and simulated values. Our work suggests the TPoS resonators as an easily integrated, low-loss platform for particle sensing applications.
Keywords :
Q-factor; aerosols; crystal resonators; sensitivity; thin film sensors; TPoS resonators; aerosol particle generator; aerosol particle mass sensors; frequency resonators; lateral extensional mode; mass sensitivity measurement; piezoelectric-on-silicon resonators; quality factor; thin film sensors; Aerosols; Q factor; Resonant frequency; Sensitivity; Sensors; Time frequency analysis;
Conference_Titel :
Frequency Control Symposium (FCS), 2010 IEEE International
Conference_Location :
Newport Beach, CA
Print_ISBN :
978-1-4244-6399-2
DOI :
10.1109/FREQ.2010.5556336
