Title :
Mass sensitivity evaluation of a Love wave sensor using the 3D Finite Element Method
Author :
Rocha-Gaso, M.-I. ; Fernández-Díaz, R. ; Arnau-Vives, A. ; March-Iborra, C.
Author_Institution :
Dept. de Ing. Electron., Univ. Politec. de Valencia, Valencia, Spain
Abstract :
The present paper describes a novel approach to evaluate the mass sensitivity of a Love wave (LW) sensor. A ZnO/XY LiNbO3 delay line based device with a sensing film was modeled and simulated applying the 3D- Finite Element Method (FEM). The radio frequency signal delays due to the thickness changes induced to the sensing film were registered and measured at the output Interdigital Transducer (IDT). The time delays were associated with phase shifts to determine the phase sensitivity of the sensor. A phase sensitivity of 600 [cm2/g] was obtained, which is in good agreement with literature.
Keywords :
Love waves; finite element analysis; interdigital transducers; sensors; zinc compounds; 3D finite element method; FEM; IDT; Love wave sensor; interdigital transducer; mass sensitivity evaluation; phase shifts; radiofrequency signal delays; Computational modeling; Films; Fingers; Finite element methods; Sensitivity; Sensors; Surface acoustic wave devices;
Conference_Titel :
Frequency Control Symposium (FCS), 2010 IEEE International
Conference_Location :
Newport Beach, CA
Print_ISBN :
978-1-4244-6399-2
DOI :
10.1109/FREQ.2010.5556338
