Title :
Polymer-MEMS torsion mirror with large rotation angle and low driving voltage
Author :
Dao, Dzung Viet ; Amaya, Satoshi ; Sugiyama, Susumu
Author_Institution :
Ritsumeikan Univ., Kusatsu, Japan
Abstract :
This paper presents a novel fabrication of a monolithic PMMA torsional mirror utilizing hot embossing, surface-activated direct bonding, and the elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding micro structures. An efficient technique using reinforcement material to protect the PMMA microstructures during release process was proposed. Monolithic PMMA torsional mirror actuated by vertical comb actuator has been fabricated and tested successfully. Since the Young´s modulus is 50 times lower than that of Si, the driving voltage of the PMMA actuator should be 7 times lower than that of silicon counterpart.
Keywords :
Young´s modulus; bonding processes; cutting; electro-optical devices; embossing; micromirrors; optical fabrication; optical polymers; optical testing; PMMA; Young modulus; elliptical vibration cutting; hot embossing; polymer-MEMS torsion mirror; reinforcement material; rotation angle; surface-activated direct bonding; vertical comb actuator; Actuators; Embossing; Fabrication; Mirrors; Plastics; Polymers; Silicon;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672200
