Title :
Translatory MEMS actuator with extraordinary large stroke for optical path length modulation
Author :
Sandner, Thilo ; Grasshoff, Thomas ; Schenk, Harald
Author_Institution :
Fraunhofer Inst. for Photonic Microsyst. (IPMS), Dresden, Germany
Abstract :
A translatory MOEMS actuator with extraordinary large stroke-especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers-is presented for the first time. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm2 aperture using four pantographs. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 500 Hz amplitude has been measured in vacuum of 50 Pa and 90 V driving voltage.
Keywords :
Fourier transform spectrometers; electrostatic actuators; infrared spectrometers; micro-optomechanical devices; microactuators; optical modulation; electrostatic resonance; frequency 500 Hz; large mirror plate; miniaturized FTIR-spectrometers; optical path length modulation; pantographs; suspension design; translational out-of-plane oscillation; translatory MOEMS actuator; Actuators; Micromechanical devices; Mirrors; Optical modulation; Optical sensors; Suspensions; Voltage measurement; Fourier-transform infrared spectrometers; Optical SOI-MEMS; infrared spectrometry; optical path length modulation; translatory micro mirrors;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672203
