• DocumentCode
    1730906
  • Title

    Self-substrate-triggered technique to enhance turn-on uniformity of multi-finger ESD protection devices

  • Author

    Ker, Ming-Dou ; Chen, Jia-Huei ; Hsu, Kuo-Chun

  • Author_Institution
    Inst. of Electron., National Chiao-Tung Univ., Hsinchu, Taiwan
  • fYear
    2005
  • Firstpage
    17
  • Lastpage
    18
  • Abstract
    A novel self-substrate-triggered (SST) technique is proposed to solve the nonuniform turn-on issue of the multi-finger GGNMOS for ESD protection. The first turned-on center finger is used to trigger on all fingers in the GGNMOS structure with self-substrate-triggered technique. So, the turn-on uniformity and ESD robustness of GGNMOS can be greatly improved by the new proposed self-substrate-triggered technique.
  • Keywords
    MOSFET; electrostatic discharge; ESD robustness; multifinger ESD protection devices; multifinger GGNMOS; self-substrate-triggered technique; turn-on uniformity enhancement; CMOS technology; Electrostatic discharge; Fingers; Integrated circuit testing; MOS devices; Nanoelectronics; Protection; Robustness; Stress; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 2005. (VLSI-TSA-Tech). 2005 IEEE VLSI-TSA International Symposium on
  • ISSN
    1930-8868
  • Print_ISBN
    0-7803-9058-X
  • Type

    conf

  • DOI
    10.1109/VTSA.2005.1497063
  • Filename
    1497063