Title :
Self-substrate-triggered technique to enhance turn-on uniformity of multi-finger ESD protection devices
Author :
Ker, Ming-Dou ; Chen, Jia-Huei ; Hsu, Kuo-Chun
Author_Institution :
Inst. of Electron., National Chiao-Tung Univ., Hsinchu, Taiwan
Abstract :
A novel self-substrate-triggered (SST) technique is proposed to solve the nonuniform turn-on issue of the multi-finger GGNMOS for ESD protection. The first turned-on center finger is used to trigger on all fingers in the GGNMOS structure with self-substrate-triggered technique. So, the turn-on uniformity and ESD robustness of GGNMOS can be greatly improved by the new proposed self-substrate-triggered technique.
Keywords :
MOSFET; electrostatic discharge; ESD robustness; multifinger ESD protection devices; multifinger GGNMOS; self-substrate-triggered technique; turn-on uniformity enhancement; CMOS technology; Electrostatic discharge; Fingers; Integrated circuit testing; MOS devices; Nanoelectronics; Protection; Robustness; Stress; Voltage;
Conference_Titel :
VLSI Technology, 2005. (VLSI-TSA-Tech). 2005 IEEE VLSI-TSA International Symposium on
Print_ISBN :
0-7803-9058-X
DOI :
10.1109/VTSA.2005.1497063
