Title :
Optical scanning with MEMS in-plane vibratory gratings and its applications
Author :
Zhou, Guangya ; Du, Yu ; Cheo, Kelvin K L ; Yu, Hongbin ; Chau, Fook Siong
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging. Coupling a grating platform to an in-plane moving structure is useful for real-time motion measurement which would otherwise be difficult to analyze. These applications are described including a recent development in the structural design of a double-layer layout which further improves the performance of the grating scanner.
Keywords :
deformation; diffraction gratings; micro-optomechanical devices; optical scanners; MEMS in-plane vibratory gratings; MEMS optical scanners; dispersive element; double-layer layout; dynamic deformation; higher resolution displays; optical scanning; real-time motion measurement; Diffraction gratings; Gratings; High speed optical techniques; Micromechanical devices; Optical device fabrication; Optical imaging; Optical reflection;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672205
