Title :
Variable RF MEMS capacitors with extended tuning range
Author :
De Coster, J. ; Puers, R. ; Tilmans, H.A.C. ; van Beek, J.T.M. ; Rijks, T.G.S.M.
Author_Institution :
Dept. of Electr. Eng., K.U. Leuven, Netherlands
Abstract :
Three distinct designs of variable RF MEMS capacitors are presented and a comparison is made in terms of their continuous tuning range. Among these designs are the classical parallel-plate capacitor, as well as the so-called two-gap structure and a novel device with torsion-beam suspensions and double actuation. This allows the capacitance to be tuned over a larger range compared to a single-driven device. As a result of this, the tuning range of the device exceeds the theoretical 50%-limit for parallel-plate capacitors. The tuning ranges of all three devices have been determined experimentally and were found to be 39% for the parallel-plate capacitor, 310% for the two-gap structure and 61% for the torsion-suspension device. The measured tuning voltages are 17 V, 22 V and 11 V respectively.
Keywords :
capacitance; capacitors; circuit tuning; microactuators; 11 V; 17 V; 22 V; capacitance; classical parallel-plate capacitor; double actuation; torsion-beam suspension devices; tuning voltages; variable RF MEMS capacitors; Capacitance; Electrodes; Filters; MOS capacitors; Micromechanical devices; Radiofrequency microelectromechanical systems; Suspensions; Tuning; Voltage; Voltage-controlled oscillators;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217132
