Title :
Single chamber adaptive membrane lens with integrated actuation
Author :
Draheim, Jan ; Schneider, Florian ; Burger, Tobias ; Kamberger, Robert ; Wallrabe, Ulrike
Author_Institution :
Dept. of Microsyst. Eng. - IMTEK, Univ. of Freiburg, Freiburg, Germany
Abstract :
In this work we introduce an extremely thin single chamber adaptive fluidic membrane lens with an integrated piezoelectric bending actuator. The height of the system is 1.76 mm and the membrane diameter 10 mm. The lens consists of a ring shaped piezo bending actuator with an optical clear silicone membrane in the center. A refractive power range of 11.3 dpt is achieved at a piezo voltage between ±40 V. The system shows a maximum resolution of 189 lp/mm measured at 50 % contrast and a focal length of 200 mm.
Keywords :
lenses; light refraction; membranes; piezoelectric actuators; silicones; integrated piezoelectric bending actuator; optical clear silicone membrane; refractive power; single chamber adaptive fluidic membrane lens; Actuators; Biomembranes; Fluids; Glass; Lenses; Optical device fabrication;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672206