Title :
Holed MEM resonators with high aspect ratio, for high accuracy frequency trimming
Author :
Civet, Yoan ; Basrour, Skandar ; Casset, Fabrice ; Icard, Béatrice ; Mercier, Denis ; Carpentier, Jean-François ; Bustos, Jessy ; Leverd, François
Author_Institution :
TIMA, Grenoble INP-UJF, Grenoble, France
Abstract :
This paper deals with a new compensation method to insure Micro-Electro-Mechanical (MEM) resonators frequency accuracy. We report new results of modeling, fabrication and characterization of MEM resonators frequency compensated fulfilling industry requirements respect to CMOS compatibility and collective correction. Both clamped-clamped beam and bulk mode resonators presenting compensation holes are treated.
Keywords :
CMOS integrated circuits; microcavities; micromechanical resonators; CMOS compatibility; bulk mode resonators; clamped-clamped beam; collective correction; high accuracy frequency trimming; high aspect ratio; holed MEM resonators; microelectro-mechanical resonator frequency accuracy; Atmospheric measurements; Electrical resistance measurement; Frequency measurement; Particle measurements; Resonant frequency; Silicon;
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2011 Proceedings of the European
Conference_Location :
Helsinki
Print_ISBN :
978-1-4577-0707-0
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2011.6044219
