Control of multi-dimensional micro-positioning stages

A tracking and decoupling control scheme for multi-dimensional micro-positioning stage with piezoelectric actuators is proposed in this paper. In this scheme, a simple tracking control strategy is developed to enable the displacement of the stage to track the reference trajectory quickly and accurately. Moreover, a decoupling compensation is considered to remove the interactive effects of multi-dimensional stage. Thus, an integral design on both tracking and decoupling control for the stage is proposed based on a hybrid sandwich model which includes both parametric and non-parametric submodels.