Title :
Control of multi-dimensional micro-positioning stages
Author :
Tan, Yonghong ; Xie, Yangqiu ; Dong, Ruili ; He, Hong
Author_Institution :
Coll. of Inf., Shanghai Normal Univ., Shanghai, China
Abstract :
A tracking and decoupling control scheme for multi-dimensional micro-positioning stage with piezoelectric actuators is proposed in this paper. In this scheme, a simple tracking control strategy is developed to enable the displacement of the stage to track the reference trajectory quickly and accurately. Moreover, a decoupling compensation is considered to remove the interactive effects of multi-dimensional stage. Thus, an integral design on both tracking and decoupling control for the stage is proposed based on a hybrid sandwich model which includes both parametric and non-parametric submodels.
Keywords :
compensation; control system synthesis; micropositioning; multidimensional systems; piezoelectric actuators; tracking; trajectory control; decoupling compensation; decoupling control scheme; hybrid sandwich model; integral design; manufacturing systems; multidimensional micropositioning stage control; nonparametric submodels; parametric submodels; piezoelectric actuators; reference trajectory; tracking control scheme; Couplings; Educational institutions; Hysteresis; Integrated circuit modeling; Neurons; Piezoelectric actuators; Trajectory;
Conference_Titel :
Advanced Mechatronic Systems (ICAMechS), 2012 International Conference on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4673-1962-1
