Title :
AlN-based MEMS devices for vibrational energy harvesting applications
Author :
Bertacchini, A. ; Scorcioni, S. ; Dondi, D. ; Larcher, L. ; Pavan, P. ; Todaro, M.T. ; Campa, A. ; Caretto, G. ; Petroni, S. ; Passaseo, A. ; De Vittorio, M.
Author_Institution :
DISMI, Univ. of Modena & Reggio Emilia, Reggio Emilia, Italy
Abstract :
This paper presents a new AlN-based MEMS devices suitable for vibrational energy harvesting applications. Due to their particular shape and unlike traditional cantilever which efficiently harvest energy only if subjected to stimulus in the proper direction, the proposed devices have 3D generation capabilities solving the problem of device orientation and placement in real applications. Thanks to their particular shape, the realized devices present more than one fundamental resonance frequencies in a range comprised between 500 Hz and 1.5 kHz, with a voltage generation higher than 300μV and an output power up to 0.4 pW for single MEMS device.
Keywords :
III-V semiconductors; aluminium compounds; energy harvesting; micromechanical devices; 3D generation capability; AlN; AlN-based MEMS device; device orientation; resonance frequency; vibrational energy harvesting; Energy harvesting; Micromechanical devices; Power generation; Resonant frequency; Shape; Vibrations; Voltage measurement;
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2011 Proceedings of the European
Conference_Location :
Helsinki
Print_ISBN :
978-1-4577-0707-0
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2011.6044220
