AlN-based MEMS devices for vibrational energy harvesting applications

Author

Bertacchini, A. ; Scorcioni, S. ; Dondi, D. ; Larcher, L. ; Pavan, P. ; Todaro, M.T. ; Campa, A. ; Caretto, G. ; Petroni, S. ; Passaseo, A. ; De Vittorio, M.

Author_Institution

DISMI, Univ. of Modena & Reggio Emilia, Reggio Emilia, Italy

fYear

2011

Firstpage

119

Lastpage

122

Abstract

This paper presents a new AlN-based MEMS devices suitable for vibrational energy harvesting applications. Due to their particular shape and unlike traditional cantilever which efficiently harvest energy only if subjected to stimulus in the proper direction, the proposed devices have 3D generation capabilities solving the problem of device orientation and placement in real applications. Thanks to their particular shape, the realized devices present more than one fundamental resonance frequencies in a range comprised between 500 Hz and 1.5 kHz, with a voltage generation higher than 300μV and an output power up to 0.4 pW for single MEMS device.

Keywords

III-V semiconductors; aluminium compounds; energy harvesting; micromechanical devices; 3D generation capability; AlN; AlN-based MEMS device; device orientation; resonance frequency; vibrational energy harvesting; Energy harvesting; Micromechanical devices; Power generation; Resonant frequency; Shape; Vibrations; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference (ESSDERC), 2011 Proceedings of the European

Conference_Location

Helsinki

ISSN

1930-8876

Print_ISBN

978-1-4577-0707-0

Electronic_ISBN

1930-8876

Type

conf

DOI

10.1109/ESSDERC.2011.6044220

Filename

6044220