Title :
High mobility solution-deposited chalcogenide films for flexible applications
Author :
Mitzi, David B. ; Milliron, Delia J. ; Copel, Matthew ; Murray, Conal ; Kosbar, Laura
Author_Institution :
IBM T.J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
The fabrication of solution-processed thin-film transistors (TFTs), which yield field-effect mobilities >10 cm2/V-sec, is a key challenge for the production of high-performance flexible electronics. This talk addresses a hydrazinium precursor approach for solution-processing metal chalcogenide films. Ultrathin n-type SnSe2-xSx, In2Se3 and p-type CuInSe2-xSx TFT channels have been deposited by spin coating from hydrazine- and nonhydrazine-based solutions, yielding saturation regime field-effect mobilities and on-off ratios as high as 16 cm2/V-s and 106, respectively. The new deposition technique is expected to be extendable to a wider range of metal chalcogenides, offering opportunities for TFTs as well as other thin-film devices, including solar cells, memory and thermoelectric devices.
Keywords :
III-VI semiconductors; IV-VI semiconductors; chalcogenide glasses; copper compounds; indium compounds; liquid phase deposition; selenium compounds; spin coating; thin film transistors; tin compounds; CuInSeS; SnSeS; field-effect mobility; high mobility solution-deposited chalcogenide films; hydrazine-based solutions; hydrazinium precursor approach; metal chalcogenide films; nonhydrazine-based solutions; spin coating; thin-film transistors; ultrathin n-type TFT channels; ultrathin p-type TFT channels; Coatings; Fabrication; Logic arrays; Photovoltaic cells; Semiconductivity; Semiconductor films; Semiconductor thin films; Sensor arrays; Substrates; Thin film transistors;
Conference_Titel :
VLSI Technology, 2005. (VLSI-TSA-Tech). 2005 IEEE VLSI-TSA International Symposium on
Print_ISBN :
0-7803-9058-X
DOI :
10.1109/VTSA.2005.1497075