DocumentCode :
1731297
Title :
Physical and electrical characterization of Germanium or Tellurium rich GexTe1−x for phase change memories
Author :
Pashkov, N. ; Navarro, G. ; Bastien, J.-C. ; Suri, M. ; Perniola, L. ; Sousa, V. ; Maitrejean, S. ; Persico, A. ; Roule, A. ; Toffoli, A. ; Reimbold, G. ; De Salvo, B. ; Faynot, O. ; Zuliani, P. ; Annunziata, R.
Author_Institution :
Leti, CEA, Grenoble, France
fYear :
2011
Firstpage :
91
Lastpage :
94
Abstract :
This paper intends to provide an overview of electrical performances of GexTe1-x with different proportions of Germanium or Tellurium for phase-change memories. Germanium-rich as well as Tellurium-rich phase-change materials have been integrated in simple test devices and programming characteristics, data retention and endurance performances are thoroughly analyzed. Tellurium-rich GeTe alloys exhibit stable programming characteristics that can sustain endurance test up to 1e7 cycles, while Germanium-rich GeTe, probably triggered by Ge segregation, shows an unstable RESET state during repeated write/erase cycles. Data retention on fresh devices is best for out-of-stoichiometry GeTe.
Keywords :
germanium compounds; phase change materials; phase change memories; GexTe1-x; RESET state; data retention; electrical characterization; electrical performances; out-of-stoichiometry; phase change materials; phase change memories; programming characteristics; test devices; write-erase cycle; Crystallization; Metals; Performance evaluation; Phase change memory; Programming; Temperature measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2011 Proceedings of the European
Conference_Location :
Helsinki
ISSN :
1930-8876
Print_ISBN :
978-1-4577-0707-0
Electronic_ISBN :
1930-8876
Type :
conf
DOI :
10.1109/ESSDERC.2011.6044227
Filename :
6044227
Link To Document :
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