DocumentCode
1731401
Title
Interferometric methods of 3D surface structure analysis
Author
de Groot, P.
Author_Institution
Zygo Corp., Middlefield, CT, USA
fYear
2012
Firstpage
1
Lastpage
3
Abstract
This brief review of modern interferometric methods of surface measurements describes basic techniques, typical applications and common performance specifications. Recent developments include model based methods, analysis of surface structures that include transparent films and optically unresolved features, and systems designed specifically to be compatible with industrial environments and international standards.
Keywords
light interferometry; surface topography measurement; 3D surface structure analysis; industrial environments; interferometric method; international standards; optically unresolved features; surface measurement; transparent film; 3D; Interferometer; metrology; microscope;
fLanguage
English
Publisher
ieee
Conference_Titel
Information Optics (WIO), 2012 11th Euro-American Workshop on
Conference_Location
Quebec City, QC
Print_ISBN
978-1-4673-2000-9
Electronic_ISBN
978-1-4673-1998-0
Type
conf
DOI
10.1109/WIO.2012.6488917
Filename
6488917
Link To Document