Title :
Through silicone vias: Multilayer interconnects for stretchable electronics
Author :
Agar, Joshua C. ; Durden, Jessica ; Zhang, Rongwei ; Staiculescu, Daniela ; Wong, C.P.
Author_Institution :
Sch. of Mater. Sci. & Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We show how stretchable Poly(dimethylsiloxane) (PDMS) electrically conductive composites (ECC) can be fabricated to form flexible, stretchable multilayer interconnects. Multilayer integration through via-like structures enables increased component interconnection and reduced form factor. We show a unique process for forming stretchable multilayer interconnects in PDMS via a bench-top layer-by-layer assembly technique. The SCC is reliable under bending, tensile (ε=0.3) and compressive strains. Furthermore, we show how the processes and package designs developed can be applied to the fabrication of stretchable devices. The techniques presented to fabricate ultra-low cost, stretchable, 3D packages hold the potential serve as a package for future stretchable electronic and radio frequency devices.
Keywords :
electronics packaging; integrated circuit interconnections; three-dimensional integrated circuits; 3D packaging; ECC; PDMS; SCC; bench-top layer-by-layer assembly technique; compressive strain; electrical conductive composite; multilayer interconnects; poly(dimethylsiloxane); radio frequency device; stretchable electronics; through silicone vias; Conductivity; Electrical resistance measurement; Materials; Silver; Strips; Surface treatment; Three dimensional displays;
Conference_Titel :
Electronic Components and Technology Conference (ECTC), 2011 IEEE 61st
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-61284-497-8
Electronic_ISBN :
0569-5503
DOI :
10.1109/ECTC.2011.5898719