Title :
On The Electromechanical Behaviour Of Thin Perforated Backplates In Silicon Condenser Microphones
Author :
Pedersen, M. ; Olthuis, W. ; Bergveld, P.
Author_Institution :
MESA Research Institute, University of Twente
Keywords :
Biomembranes; Electrets; Mechanical sensors; Micromachining; Microphones; Numerical simulation; Silicon; Solids; Stress; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721732
