Title :
Static And Dynamic Flow Simulation Of A Koh-etched Micro Valve
Author :
Ulrich, J. ; Fuller, H. ; Zengerle, R.
Author_Institution :
Siemens AG
Keywords :
Electrostatic measurements; Finite element methods; Fluid dynamics; Fluid flow; Micropumps; Microvalves; Pumps; Solid modeling; Solid state circuits; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721733
