• DocumentCode
    1732065
  • Title

    Compact modeling of FinFETs featuring independent-gate operation mode

  • Author

    Lin, C.H. ; Dunga, M. ; Balasubramanian, S. ; Niknejad, A.M. ; Hu, C. ; Xi, X. ; He, J. ; Chang, L. ; Williams, R.Q. ; Ketchen, M.B. ; Haensch, W.E. ; Chan, M.

  • Author_Institution
    Dept. of EECS, Univ. of California at Berkeley, CA, USA
  • fYear
    2005
  • Firstpage
    120
  • Lastpage
    121
  • Abstract
    This paper describes the concept of the dynamic VTH control in the compact modeling of FinFET. The model is implemented into Berkeley SPICE3 and verified with multiple-dimensional device simulator.
  • Keywords
    SPICE; circuit simulation; field effect transistors; semiconductor device models; voltage control; FinFET; SPICE3; compact modeling; dynamic VTH control; field effect transistor; independent-gate operation mode; multiple-dimensional device simulator; CMOS technology; Circuit simulation; Doping; FinFETs; Microelectronics; Semiconductor process modeling; Thickness control; Threshold voltage; Virtual manufacturing; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 2005. (VLSI-TSA-Tech). 2005 IEEE VLSI-TSA International Symposium on
  • ISSN
    1930-8868
  • Print_ISBN
    0-7803-9058-X
  • Type

    conf

  • DOI
    10.1109/VTSA.2005.1497105
  • Filename
    1497105
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1732065