Title :
"Membuilder": An Automated 3D Solid Model Construction Program For Microelectromechanical Structures
Author :
Osterberg, Peter M. ; Senturia, Stephen D.
Author_Institution :
Microsystems Technology Laboratories, Department of Electrical Engineering and Computer Science Massachusetts Institute of Technolog
Keywords :
Actuators; Data visualization; Emulation; Etching; Hazards; Micromechanical devices; Performance analysis; Productivity; Solid modeling; Solid state circuits;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721734
