DocumentCode
1732070
Title
"Membuilder": An Automated 3D Solid Model Construction Program For Microelectromechanical Structures
Author
Osterberg, Peter M. ; Senturia, Stephen D.
Author_Institution
Microsystems Technology Laboratories, Department of Electrical Engineering and Computer Science Massachusetts Institute of Technolog
Volume
2
fYear
1995
Firstpage
21
Lastpage
24
Keywords
Actuators; Data visualization; Emulation; Etching; Hazards; Micromechanical devices; Performance analysis; Productivity; Solid modeling; Solid state circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721734
Filename
721734
Link To Document