DocumentCode

1732303

Title

A Milli Newton Micro Loading Device

Author

Saif, M.T.A. ; MacDonald, N.C.

Author_Institution

Cornell University

Volume

2

fYear

1995

Firstpage

60

Lastpage

63

Keywords

Arm; Bars; Capacitors; Crystalline materials; Instruments; Silicon; Spine; Testing; Thermal force; Thin film devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721744

Filename

721744