Title :
A Milli Newton Micro Loading Device
Author :
Saif, M.T.A. ; MacDonald, N.C.
Author_Institution :
Cornell University
Keywords :
Arm; Bars; Capacitors; Crystalline materials; Instruments; Silicon; Spine; Testing; Thermal force; Thin film devices;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721744
