Title :
Measurement Of Piezoelectricity Of Thin Film By Using Laser Interferometry And Davies´ Bar
Author :
Umeda, Akira ; Ueda, Kazunaga ; Usuda, Takashi ; Tanaka, Katsuhiko ; Toyama, Motoo ; Kubo, Ryuichi
Author_Institution :
National Research Laboratory of Metrology
Keywords :
Acceleration; Bandwidth; Frequency; Interferometry; Optical reflection; Piezoelectric films; Piezoelectricity; Pulse generation; Silicon; Vibration measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721745
