DocumentCode

1732385

Title

Fracture Strength Of Doped And Undoped Polysilicon

Author

Biebl, M. ; von Philipsborn, H.

Author_Institution

Universitat Regensburg

Volume

2

fYear

1995

Firstpage

72

Lastpage

75

Keywords

Etching; Geometry; Grain boundaries; Hafnium; Residual stresses; Silicon; Stress measurement; Surface cracks; Tensile stress; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721747

Filename

721747