DocumentCode
1732429
Title
Young´s Modulus Of In Situ Phosphorus-doped Polysilicon
Author
Biebl, M. ; Brand, G. ; Howe, R.T.
Author_Institution
Siemens, Corporate Research & Development
Volume
2
fYear
1995
Firstpage
80
Lastpage
83
Keywords
Actuators; Fabrication; Mechanical variables measurement; Micromechanical devices; Plasma temperature; Semiconductor device measurement; Silicon; Temperature dependence; Temperature distribution; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721749
Filename
721749
Link To Document