Title :
Young´s Modulus Of In Situ Phosphorus-doped Polysilicon
Author :
Biebl, M. ; Brand, G. ; Howe, R.T.
Author_Institution :
Siemens, Corporate Research & Development
Keywords :
Actuators; Fabrication; Mechanical variables measurement; Micromechanical devices; Plasma temperature; Semiconductor device measurement; Silicon; Temperature dependence; Temperature distribution; Temperature measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721749
