Title :
High Sensitive Internal Film Stress Measurement By An Improved Micromachined Indicator Structure
Author :
Ericson, Fredric ; Greek, Staffan ; Söderkvist, Jan ; Schweitz, Jan-Åke
Author_Institution :
Uppsala University
Keywords :
Accelerometers; Actuators; Arm; Compressive stress; Etching; Internal stresses; Mechanical factors; Production; Stress measurement; Tensile stress;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721750
