DocumentCode
1732484
Title
Determination Of The Elastic Temperature Coefficients Of Monocrystalline Silicon
Author
Bourgeois, C. ; Hermann, J. ; Blanc, N. ; de Rooij, N.F. ; Rudolf, F.
Author_Institution
CSEM Centre Suisse d´´Electronique et de Microtechnique SA
Volume
2
fYear
1995
Firstpage
92
Lastpage
95
Keywords
Availability; Frequency; Mechanical factors; Mechanical sensors; Micromachining; Microstructure; Silicon; Springs; Temperature measurement; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721752
Filename
721752
Link To Document