Title :
Resistance-temperature Characteristics Of Polycrystalline Sic/diamond Structure
Author :
Yonekubo, So ; Kamimura, Kiichi ; Onuma, Yoshiharu
Author_Institution :
Precision Technology Research Institute of Nagano Prefecture
Keywords :
Conductivity; Electrodes; Plasma chemistry; Plasma temperature; Semiconductor thin films; Silicon carbide; Substrates; Thermistors; Thin film sensors; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721758
