Title :
A Novel Micromechanical Temperature Memory Sensor
Author :
Goldman, Ken ; Mehregany, Mehran
Author_Institution :
Department of Electrical Engineering and Applied Physics, Case Western Reserve University
Keywords :
Actuators; Fabrication; Finite element methods; Micromachining; Micromechanical devices; Probes; Silicon; Structural beams; Temperature sensors; Testing;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721762
