DocumentCode

1732722

Title

A Novel Micromechanical Temperature Memory Sensor

Author

Goldman, Ken ; Mehregany, Mehran

Author_Institution

Department of Electrical Engineering and Applied Physics, Case Western Reserve University

Volume

2

fYear

1995

Firstpage

132

Lastpage

135

Keywords

Actuators; Fabrication; Finite element methods; Micromachining; Micromechanical devices; Probes; Silicon; Structural beams; Temperature sensors; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721762

Filename

721762