Title :
Microfabricated High Energy Particle Detector
Author :
Han, J. ; Smith, R.L. ; Lander, Richard
Author_Institution :
Dept. of Physics, U.C. Davis
Keywords :
Anodes; Argon; Cathodes; Electrons; Etching; Ionization; Radiation detectors; Silicon; Substrates; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721766
