Title :
Miniaturised Polarisation Sensor As A Concept For New Optical Microsystems
Author :
Stenkamp, B. ; Abraham, M. ; Amato, J.P. ; Zetterer, Th ; Pokrowsky, P.
Author_Institution :
IMM Institut fur Mikrotechnik GmbH
Keywords :
Microelectronics; Optical films; Optical polarization; Optical refraction; Optical sensors; Optical variables control; Process control; Refractive index; Thin film sensors; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721769
