• DocumentCode
    1732967
  • Title

    High Temperature Microsensors Based On Polycrystalline Diamond Thin Films

  • Author

    Obermeier, Ernst

  • Author_Institution
    Technical University of Berlin, Microsensor and Microactuator Technology
  • Volume
    2
  • fYear
    1995
  • Firstpage
    178
  • Lastpage
    181
  • Keywords
    Boron; Conductivity; Doping; Etching; Fabrication; Microsensors; Plasma applications; Plasma temperature; Silicon; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Conference_Location
    Stockholm, Sweden
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721774
  • Filename
    721774
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1732967