Title :
A Novel Low Field Electron Emission Polyerystalline Diamond Microtip Arrays For Sensor Applications
Author :
Kang, W.P. ; Davidson, Jennifer L. ; Li, Q. ; Xu, J.F. ; Kinser, D.L. ; Kerns, D.V.
Author_Institution :
Depts. of Applied & Engineering Sciences, and Electrical & Computer Engineering, Vanderbilt Univ
Keywords :
Application software; Diodes; Electron emission; Fabrication; Micromachining; Microsensors; Sensor arrays; Silicon; Substrates; Tactile sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721775
