DocumentCode
1733029
Title
Silicon Carbide As A Mechanical Material
Author
Krotz, G. ; Legner, W. ; Wapner, C. ; Moller, H. ; Sonntag, H. ; Muller, Gunter
Author_Institution
Dain-der-Benz AG
Volume
2
fYear
1995
Firstpage
186
Lastpage
189
Keywords
Chemicals; Fabrication; Mechanical factors; Optical films; Semiconductor films; Semiconductor materials; Silicon carbide; Substrates; Temperature; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721776
Filename
721776
Link To Document