Title :
Silicon Carbide As A Mechanical Material
Author :
Krotz, G. ; Legner, W. ; Wapner, C. ; Moller, H. ; Sonntag, H. ; Muller, Gunter
Author_Institution :
Dain-der-Benz AG
Keywords :
Chemicals; Fabrication; Mechanical factors; Optical films; Semiconductor films; Semiconductor materials; Silicon carbide; Substrates; Temperature; Thermal conductivity;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721776
