Title :
Properties Of Heteroepitaxial 3c-SiC Films Grown by LPCVD
Author :
Yamaguchi, Yoh-ichi ; Nagasawa, Hiroyuki ; Shoki, Tsutomu ; Annaka, Norimichi
Author_Institution :
HOYA Corporation
Keywords :
Biomembranes; Crystallization; Grain size; Internal stresses; Optical films; Optical sensors; Semiconductor films; Silicon carbide; Stress measurement; Wet etching;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721777
