Title :
Applications Of Crystalline-amorphous Phase Transitions In Silicon Carbide
Author :
Wagner, Ch ; Krötz, G. ; Sonntag, H. ; Muller, G. ; Midler, G. ; Kalbitzer, S.
Author_Institution :
Daimler-Benz AG
Keywords :
Amorphous materials; Biomembranes; Crystallization; Etching; Optical films; Optical sensors; Plasma applications; Semiconductor films; Silicon carbide; Thermal conductivity;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721778
