Sputter Deposition Of TiNi And TiNiPd Films Displaying The Two Way Shape Memory Effect

Author

Quandt, E. ; Halene, C. ; Holleck, H. ; Feit, K. ; Kohl, M. ; Macher, P. Schlo

Author_Institution

Forschungszentrum Karlsruhe GmbH

Volume

fYear

1995

Firstpage

202

Lastpage

205

Keywords

Actuators; Annealing; Hysteresis; Magnetic materials; Magnetostriction; Microactuators; Shape; Sputtering; Substrates; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.721780

Filename

721780

Link To Document