Title :
Thin Film Boron Doped Polycrystalline Silicon/sub70%/-germanium/sub30%/ For Thermopiles
Author :
Van Gerwen, P. ; Slater, T. ; Chévrier, J.B. ; Baert, K. ; Mertens, R.
Author_Institution :
IMEC, MAP MS-division
Keywords :
Biomembranes; Boron; Conducting materials; Resistance heating; Semiconductor thin films; Silicon; Temperature; Thermal conductivity; Thermal resistance; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721782
