Title :
Technology Of Diamond Microelctromechanical Systems
Author :
Aslam, M. ; Schulz, D.
Author_Institution :
Department of Electrical Engineering, Michigan State University
Keywords :
Atomic force microscopy; Atomic layer deposition; Chromium; Gears; Hydrogen; Inductors; Scanning electron microscopy; Semiconductor films; Temperature distribution; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721785
