Title :
A novel optical displacement sensor base on composite diffraction grating
Author :
Wang Dong-hui ; Liu Lin ; Zheng Pu-chao ; Bao Yan ; Li Bing-shi
Author_Institution :
Flight Autom. Control Res. Inst., Xi´an, China
Abstract :
A novel optical displacement sensor based on composite diffraction grating was presented. The main influence factors of the sensor error and the principle of error compensation were theoretically analyzed. Both high temperature experiment and low temperature experiment were carried out to prove compensation effect of the composite diffraction grating. The experimental results proved that the position precision of the sensor after error compensation is 0.013nm at high temperature and 0.031nm at low temperature, which satisfies the requirements of optical displacement sensor.
Keywords :
diffraction gratings; displacement measurement; error compensation; optical sensors; composite diffraction grating; error compensation; optical displacement sensor; sensor error; Adaptive optics; Diffraction; Optical diffraction; Optical fiber sensors; Optical fibers; composite diffraction grating; diffraction; error compensation; optical displacement sensor;
Conference_Titel :
Control Conference (CCC), 2013 32nd Chinese
Conference_Location :
Xi´an
