DocumentCode

1734409

Title

A New Fabrication Process Of A Planar Coil Using Photosensitive Polyimide And Electroplating

Author

Watanabe, Y. ; Edo, M. ; Nakazawa, H. ; Yonezawa, E.

Author_Institution

Fuji Electric Corporate Research and Development, Ltd.

Volume

2

fYear

1995

Firstpage

268

Lastpage

271

Keywords

Actuators; Coils; Copper; Electromagnetic forces; Fabrication; Lithography; Platinum; Polyimides; Sputtering; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721797

Filename

721797