DocumentCode
1734473
Title
Fabrication of 2D pH CMOS image sensors and real time imaging of chemical reaction
Author
Hizawa, Takeshi ; Sawada, Kazuaki ; Takao, Hidekuni ; lshida, M.
Author_Institution
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
Volume
2
fYear
2005
Firstpage
1138
Abstract
We present about pH image sensors, which are capable of measuring 2D distribution of various chemical reaction in real time. The pH CMOS image sensor using charge transfer technique is a novel pH sensor and imaging sensor that is capable of measuring variations on the chemical reaction as an image, and it was fabricated by CMOS (complimentary metal-oxide semiconductor) circuit process technology. Prototype pH CMOS image sensors are successfully fabricated and measured 2D distribution of various chemical reactions in moving image at 1/30 sec per 1 frame. It is expected that the pH CMOS image sensor is able to use for novel applications such as medical and biochemistry field.
Keywords
CMOS image sensors; chemical sensors; pH measurement; 2D pH CMOS image sensors; CMOS circuit process technology; charge transfer technique; complimentary metal-oxide semiconductor; pH measurement; real time chemical reaction imaging; CMOS image sensors; Charge measurement; Charge transfer; Charge-coupled image sensors; Chemical processes; Chemical sensors; Chemical technology; Current measurement; Fabrication; Image sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1497277
Filename
1497277
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