• DocumentCode
    1734473
  • Title

    Fabrication of 2D pH CMOS image sensors and real time imaging of chemical reaction

  • Author

    Hizawa, Takeshi ; Sawada, Kazuaki ; Takao, Hidekuni ; lshida, M.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
  • Volume
    2
  • fYear
    2005
  • Firstpage
    1138
  • Abstract
    We present about pH image sensors, which are capable of measuring 2D distribution of various chemical reaction in real time. The pH CMOS image sensor using charge transfer technique is a novel pH sensor and imaging sensor that is capable of measuring variations on the chemical reaction as an image, and it was fabricated by CMOS (complimentary metal-oxide semiconductor) circuit process technology. Prototype pH CMOS image sensors are successfully fabricated and measured 2D distribution of various chemical reactions in moving image at 1/30 sec per 1 frame. It is expected that the pH CMOS image sensor is able to use for novel applications such as medical and biochemistry field.
  • Keywords
    CMOS image sensors; chemical sensors; pH measurement; 2D pH CMOS image sensors; CMOS circuit process technology; charge transfer technique; complimentary metal-oxide semiconductor; pH measurement; real time chemical reaction imaging; CMOS image sensors; Charge measurement; Charge transfer; Charge-coupled image sensors; Chemical processes; Chemical sensors; Chemical technology; Current measurement; Fabrication; Image sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
  • Print_ISBN
    0-7803-8994-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2005.1497277
  • Filename
    1497277