DocumentCode

1734516

Title

Silicon Microvalves For Gas Flow Control

Author

Barth, Phillip W.

Author_Institution

Hewlett-Packard Laboratories

Volume

2

fYear

1995

Firstpage

276

Lastpage

279

Keywords

Actuators; Fluid flow; Magnetic fields; Microvalves; Orifices; Packaging; Pressure control; Silicon; Solenoids; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721799

Filename

721799