Title :
Silicon Microvalves For Gas Flow Control
Author :
Barth, Phillip W.
Author_Institution :
Hewlett-Packard Laboratories
Keywords :
Actuators; Fluid flow; Magnetic fields; Microvalves; Orifices; Packaging; Pressure control; Silicon; Solenoids; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721799
