Title :
Bakable Silicon Pneumatic Microvalve
Author :
Sim, D.Y. ; Kurabayashi, T. ; Esashi, M.
Author_Institution :
Faculty of Engineering, Tohoku University Sendai
Keywords :
Bonding; Control systems; Fabrication; Fluid flow; Force control; Glass; Microvalves; Pneumatic actuators; Silicon; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721800
