Title :
A Pneumatically Actuated Micro Valve With A Silicone Rubber Membrane For Integration With Fluid-handling Systems
Author :
Vicider, C. ; Öhman, Ove ; Elderstig, Håkan
Author_Institution :
Industrial Microelectronics Center
Keywords :
Biomembranes; Biosensors; Etching; Micromachining; Microvalves; Optical device fabrication; Rubber; Semiconductor materials; Silicon; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721801
