• DocumentCode
    1734562
  • Title

    A Pneumatically Actuated Micro Valve With A Silicone Rubber Membrane For Integration With Fluid-handling Systems

  • Author

    Vicider, C. ; Öhman, Ove ; Elderstig, Håkan

  • Author_Institution
    Industrial Microelectronics Center
  • Volume
    2
  • fYear
    1995
  • Firstpage
    284
  • Lastpage
    286
  • Keywords
    Biomembranes; Biosensors; Etching; Micromachining; Microvalves; Optical device fabrication; Rubber; Semiconductor materials; Silicon; Valves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721801
  • Filename
    721801
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1734562