Title :
Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar
Author :
Yuuki, Shinya ; Sasaki, Minoru ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomechanics, Tohoku Univ., Sendai, Japan
Abstract :
A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.
Keywords :
micromechanical devices; micromirrors; rotation; silicon; thin film devices; torsion; 5 V; Si; bulk silicon; low voltage driving; micromirror; mirror rotation; tense thin film; tensile stress; torsion bar; vertical comb; Electrostatic actuators; Etching; Fabrication; Micromirrors; Mirrors; Semiconductor thin films; Silicon compounds; Springs; Tensile stress; Transistors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497284
