Title :
Batch-fabricated high dense multi sliders for WDM spectral attenuation
Author :
Konishi, S. ; Oshima, A. ; Kinoshita, N. ; Kumagaya, I. ; Kishi, T. ; Shimazu, T. ; Katayama, M.
Author_Institution :
Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kyoto, Japan
Abstract :
This paper reports MEMS based mechanical dynamic gain equalizer (hereafter DGEQ) which is expected to equalize the nonuniformities of spectral intensity in WDM transportation. Batch-fabricated multisliders for DGEQ are presented as our continuous research on optical application of electrostatic controlled linear inchworm actuator (hereafter ECLIA). 16 multisliders (600 μm wide) corresponding to 16 channels are fabricated by DRIE and bonded on a pyrex glass substrate for a reliable electrical isolation. Operating of developed multisliders and their optical attenuation as DGEQ will be reported in succession to design and fabrication of device.
Keywords :
batch processing (industrial); electrostatic actuators; equalisers; isolation technology; micro-optics; micromechanical devices; optical attenuators; optical communication equipment; optical wavelength conversion; DRIE; WDM spectral attenuation; WDM transportation; dynamic gain equalizer; electrical isolation; electrostatic controlled linear inchworm actuator; multisliders; optical MEMS; optical attenuation; spectral intensity; Attenuation; Bonding; Electrostatic actuators; Equalizers; Hydraulic actuators; Micromechanical devices; Optical attenuators; Optical control; Transportation; Wavelength division multiplexing;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497304
