DocumentCode
1735230
Title
Diffractive-MEMS implementation of a Hadamard near-infrared spectrometer
Author
Day, David R. ; Butler, Michael A. ; Smith, Malcolm C. ; McAllister, Abraham ; Deutsch, Erik R. ; Zafiriou, Kostas ; Senturia, Stephen D.
Author_Institution
Polychromix, Inc., Wilmington, MA, USA
Volume
2
fYear
2005
Firstpage
1246
Abstract
This paper describes the implementation of an optically efficient near-infrared spectrometer using a diffractive-MEMS chip in combination with digital-transform methods. This spectrometer architecture offers potential advantages over conventional detector-array-based designs because the modulation inherent in the use of digital-transform spectroscopy not only permits the normal signal-to-noise improvements associated with modulation of the light source, but it also creates an inherent insensitivity to stray light. Sample applications, illustrated here for the specific case of the Hadamard digital transform, include material inspection and identification and the monitoring of dynamic processes, such as epoxy-resin cure.
Keywords
Hadamard transforms; diffractive optical elements; infrared spectrometers; micro-optics; micromechanical devices; optical modulation; optical noise; Hadamard digital transform; Hadamard near-infrared spectrometer; detector-array-based designs; diffractive-MEMS chip; digital transform spectroscopy; dynamic process monitoring; light source modulation; material identification; material inspection; spectrometer architecture; Diffraction gratings; Infrared detectors; Infrared spectra; Optical arrays; Optical diffraction; Optical filters; Optical modulation; Optical sensors; Sensor arrays; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1497305
Filename
1497305
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