• DocumentCode
    1735230
  • Title

    Diffractive-MEMS implementation of a Hadamard near-infrared spectrometer

  • Author

    Day, David R. ; Butler, Michael A. ; Smith, Malcolm C. ; McAllister, Abraham ; Deutsch, Erik R. ; Zafiriou, Kostas ; Senturia, Stephen D.

  • Author_Institution
    Polychromix, Inc., Wilmington, MA, USA
  • Volume
    2
  • fYear
    2005
  • Firstpage
    1246
  • Abstract
    This paper describes the implementation of an optically efficient near-infrared spectrometer using a diffractive-MEMS chip in combination with digital-transform methods. This spectrometer architecture offers potential advantages over conventional detector-array-based designs because the modulation inherent in the use of digital-transform spectroscopy not only permits the normal signal-to-noise improvements associated with modulation of the light source, but it also creates an inherent insensitivity to stray light. Sample applications, illustrated here for the specific case of the Hadamard digital transform, include material inspection and identification and the monitoring of dynamic processes, such as epoxy-resin cure.
  • Keywords
    Hadamard transforms; diffractive optical elements; infrared spectrometers; micro-optics; micromechanical devices; optical modulation; optical noise; Hadamard digital transform; Hadamard near-infrared spectrometer; detector-array-based designs; diffractive-MEMS chip; digital transform spectroscopy; dynamic process monitoring; light source modulation; material identification; material inspection; spectrometer architecture; Diffraction gratings; Infrared detectors; Infrared spectra; Optical arrays; Optical diffraction; Optical filters; Optical modulation; Optical sensors; Sensor arrays; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
  • Print_ISBN
    0-7803-8994-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2005.1497305
  • Filename
    1497305