DocumentCode
1735395
Title
High Power Applications of RF-MEMS
Author
Blondy, P. ; Palego, C. ; Pothier, A. ; Crunteanu, A. ; Gasseling, T. ; Champeaux, C. ; Catherinot, A. ; Tristant, P.
Author_Institution
UMR CNRS, Univ. de Limoges
fYear
2007
Firstpage
166
Lastpage
168
Abstract
This paper presents recent results on the development of high power MEMS switched varactors. Design methodology as well as fabrication and measurement results are presented. The MEMS varactors are made of a thick metal gold cantilever, with a reduced contact area, that allows to control high power microwave signals. Operation up to 5 watts CW is demonstrated, with good reliability. First results on applications to phase shifters is presented
Keywords
cantilevers; gold; microswitches; microwave switches; phase shifters; varactors; Au; Gold cantilever; MEMS switched varactors; RF-MEMS; microwave switches; phase shifters; Conductors; Energy consumption; Fabrication; Micromechanical devices; Microwave circuits; Phase shifters; Power system reliability; Radiofrequency microelectromechanical systems; Switches; Varactors; RF-MEMS; high power microwave signals; phase shifters; reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon Monolithic Integrated Circuits in RF Systems, 2007 Topical Meeting on
Conference_Location
Long Beach, CA
Print_ISBN
0-7803-9764-9
Electronic_ISBN
0-7803-9765-7
Type
conf
DOI
10.1109/SMIC.2007.322785
Filename
4117352
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