DocumentCode
1735925
Title
Temperature dependence of resistance in Black´s equation and in calibration for SWEAT and NIST structures: the parameter TEO
Author
Crowell, C.R. ; Shih, Chih-Ching ; Jonggook, K. ; Tyree, Vance C.
fYear
1999
fDate
6/21/1905 12:00:00 AM
Firstpage
142
Lastpage
143
Abstract
The equation for resistance R(T) at temperature T can be expressed in the form R(T)=(dR/dT).(T-TEO. When dR/dT is constant over the range of your experiment, TEO is then a constant, the temperature at which R(T) extrapolates to zero. If we wish to express the corresponding relationship with β(Tr), the temperature coefficient of resistivity (TCR) at temperature Tr, β(Tr) is defined in the form β(Tr)=(dR/dTr).(1/R(Tr))=1/(T r-TEO). For both these equations it is desirable to use the Kelvin scale for T, especially when activation energy terms occur in the test under consideration. Our experimental measurements of temperature calibration have yielded TEO values less than 40 degrees Kelvin, and with sufficient accuracy such that materials properties can be usefully determined provided that the test temperature is not too high. When β(Tr) is specified by an independent source, it is necessary that Tr be included in both theoretical and experimental cases
Keywords
electrical resistivity; Black´s equation; NIST structures; SWEAT; TEO parameter; calibration; temperature dependence of resistance; Calibration; Conductivity; Equations; Kelvin; NIST; Semiconductor device measurement; Temperature dependence; Temperature distribution; Temperature measurement; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 1999. IEEE International
Conference_Location
Lake Tahoe, CA
Print_ISBN
0-7803-5649-7
Type
conf
DOI
10.1109/IRWS.1999.830579
Filename
830579
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