Micro-mirror arrays for adaptive optics fabricated in polymer technology

The combination of full-wafer bonding with a polymer technology for the fabrication of deformable micro-mirrors is presented. A self-supporting membrane mirror fabricated using SU-8 can be used for adaptive optical systems. Electrostatic actuation is used in combination with an electrode array beneath the membrane to deform the mirror. The mechanical properties of the SU-8 polymer are such that the forces required for deflection are reduced, thus increasing mirror flexibility and sensitivity, but the fabrication process is simple and potentially low cost. The described technology can also be used to produce other types of membrane devices such as pressure sensors, pumps or valves.