• DocumentCode
    1736035
  • Title

    Silicon Active Microvalves Using Buckled Membranes For Actuation

  • Author

    Popescu, Dan S. ; Dascalu, Dan C. ; Elwenspoek, Miko ; Lammerink, Theo

  • Volume
    2
  • fYear
    1995
  • Firstpage
    305
  • Lastpage
    308
  • Keywords
    Aluminum; Biomembranes; Compressive stress; Internal stresses; Microvalves; Resistors; Silicon; Temperature; Thermal resistance; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721807
  • Filename
    721807
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1736035