Title :
Silicon Active Microvalves Using Buckled Membranes For Actuation
Author :
Popescu, Dan S. ; Dascalu, Dan C. ; Elwenspoek, Miko ; Lammerink, Theo
Keywords :
Aluminum; Biomembranes; Compressive stress; Internal stresses; Microvalves; Resistors; Silicon; Temperature; Thermal resistance; Thermal stresses;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721807
